发明名称 METHOD FOR TRIMMING SEMICONDUCTOR DEVICE WITH POLYSILICON FUSE
摘要 PROBLEM TO BE SOLVED: To provide a method for stably trimming (writing) a semiconductor device with a polysilicon fuse. SOLUTION: According to the method for trimming the semiconductor device, in the semiconductor device with a polysilicon fuse 101 having a fusion portion 101a, the fusion portion 101a is fused by applying voltage to the polysilicon fuse 101, and at the same time, after predetermined time from the beginning of applying the voltage, application voltage is stopped in a state where the current flowing in the fused polysilicon fuse. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008252120(A) 申请公布日期 2008.10.16
申请号 JP20080150743 申请日期 2008.06.09
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MATSUNAGA TOMOHIRO;MOGAMI KOJI
分类号 H01L21/82;H01L21/768;H01L23/525;H01L23/62 主分类号 H01L21/82
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