| 摘要 |
PROBLEM TO BE SOLVED: To provide a removing method of a substrate capable of easily and surely removing the substrate from on the stage while preventing the breakage of the substrate. SOLUTION: In this removing method of the substrate, the blowing process for blowing a gas to the surface of the substrate 1 on the stage 20 side and making the gas abut that surface after terminating the holding state of the substrate 1 realized by a holding means 30 for holding the substrate 1 on the stage 20, and the stopping process for stopping the blowing of the gas realized in the blowing process are repetitively carried out to remove the substrate 1 from on the stage 20. COPYRIGHT: (C)2009,JPO&INPIT |
