| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein there is a fear that the malfunction of a circuit element is generated by the intrusion of an ultraviolet light and a visible light to the circuit element in a conventional semiconductor photosensor. SOLUTION: The semiconductor photosensor has a circuit-element forming region and a photodiode forming region formed by a separation from the circuit-element forming region. The semiconductor photosensor has a silicon board, an insulating layer formed on the silicon board, a board with a silicon layer formed on the insulating layer, and a photodiode formed to the silicon layer in the photodiode forming region. The semiconductor photosensor further has: the circuit element formed to the silicon layer in the circuit-element forming region; a first interlayer insulating film formed to the upper section of the silicon layer for the board; a first light-shielding film being formed on the first interlayer film in the circuit-element forming region and having an opening section in the photodiode forming region; and a first light-shielding plug arranged between the circuit-element forming region and the photodiode forming region, and connecting the silicon board and the first light-shielding film. COPYRIGHT: (C)2009,JPO&INPIT
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