摘要 |
<P>PROBLEM TO BE SOLVED: To attain reduction of an absorption loss coefficient of a transparent electrode used when an electrooptical element having an IR diffraction structural part is formed utilizing a liquid crystal and to prevent a signal delay due to increase of resistance of the transparent electrode. <P>SOLUTION: In the electrooptical element, an outer peripheral electrode composed of a metal film is provided at an outer periphery of a liquid crystal optical control part, a terminal electrode connected to an external circuit is provided at the outer peripheral electrode via a connection electrode, the metal film is formed by a method for using a vapor deposition mask and a structure for preventing deterioration of the transparent electrode is adopted. <P>COPYRIGHT: (C)2009,JPO&INPIT |