| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an aqueous abrasive particle dispersion medium composite with excellent abrasive particle dispersion stability and excellent viscosity stability, and also to provide processing aqueous slurry, and a processing method using them. <P>SOLUTION: This aqueous abrasive particle dispersion medium composite contains: glycols (for example, propylene glycol or the like), and/or aqueous ether (for example, diethylene glycol monochrome butyl ether or the like); and particles with zeta potential of 0 mV or more (for example, Al<SB>2</SB>O<SB>3</SB>). This processing aqueous slurry contains: the aqueous abrasive particle dispersion medium composite; and abrasive particles (for example, silicon carbide and the like). This processing method performs machining, grinding, polishing, and cutting, by using the aqueous abrasive particle medium composite or the processing aqueous slurry. Another processing method also performs wire-saw processing and band-saw processing using the aqueous abrasive particle medium composite or the processing aqueous slurry. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
