| 摘要 |
A light irradiation apparatus includes a light modulation element which has a step line of a phase step having a phase difference different from 180 degrees, and modulates a phase of incident light. An illumination optical system illuminates the modulation element with illumination light inclined in a direction perpendicular to the step line. An image forming optical system forms a light intensity distribution on a crystallized plane, based on the light subjected to phase modulation. The illumination optical system simultaneously illuminates the modulation element with first light which illuminates the modulation element along a first direction extending from a phase advance side toward a phase retardation side of the phase step and second light which illuminates the modulation element along a second direction extending from the phase retardation side toward the phase advance side, and has a light intensity setting mechanism which sets different light intensities of the first and second lights.
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