The invention maintains ion current balance (50) by independently controlling a positive ion voltage source (70) and a negative io voltage source (72).
申请公布号
WO2007118182(A3)
申请公布日期
2008.10.16
申请号
WO2007US66119
申请日期
2007.04.06
申请人
MKS INSTRUMENTS, INC.;GEFTER, PETER;OLDYNSKI, EDWARD;WARREN, BRIAN
