| 摘要 |
<P>PROBLEM TO BE SOLVED: To permit high precision and high density of a piezoelectric element to be realized. <P>SOLUTION: The method of manufacturing a liquid discharge head which pressurizes a liquid in a pressure chamber by using the displacement of the piezoelectric element and discharges droplets from nozzles communicating with the pressure chamber, has the process of sequentially laminating a first electrode layer, a piezoelectric material layer, and a second electrode layer which are to be the piezoelectric element on a structure in which a space portion equivalent to the pressure chamber is formed, the process of forming a mask layer on the second electrode layer and patterning the mask layer so as to leave a mask in an area smaller than the inside area of a projection space portion in which the space portion is projected at the side where the mask layer is formed, and the process of patterning at least the second electrode layer and the piezoelectric material layer by dry etching through the mask layer after the patterning. <P>COPYRIGHT: (C)2009,JPO&INPIT |
