| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oxime sulfonic acid ester as an acid-forming agent, excellent in preservation stability, and by using the acid-forming agent, also a photosensitive composition extremely excellent in preservation stability. <P>SOLUTION: This oxime sulfonic acid compound characterized by being expressed by general formula (1) [wherein, R<SP>1</SP>is any of an alkyl, an aryl or a heteroaromatic group which may have a substituent; Ar is an aromatic or a heteroaromatic group which may have a substituent; X is any of O and S: and A is preferably any of the forms of 5 and 6-membered rings] and a photosensitive composition by using the same are provided. <P>COPYRIGHT: (C)2009,JPO&INPIT |
