| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an X-ray crystal orientation measuring instrument and method for performing high-speed map measurement on a specimen of sub-grain structure or of linage structure by materializing substantial shortening of time required for plane direction measurement. <P>SOLUTION: In this X-ray crystal orientation measuring instrument and method, X rays are applied to a measurement surface of a measured crystal S to detect diffraction spots acquired correspondingly to a lattice plane of the crystal through the application of the X rays, and the center position of the detected diffraction spots is measured to calculate a lattice-plane normal line of the crystal. The diffraction spots from application point on the measurement surface of the measured crystal are detected by means of a two-dimensional detector comprising a CCD (TDI-CCD) 34 operating in a TDI read-out mode. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
