Particles are removed from a surface of a substrate (13) by a method comprising causing liquid aerosol droplets comprising water and a tensioactive compound to contact the surface with sufficient force to remove particles from the surface.
申请公布号
WO2008008216(A3)
申请公布日期
2008.10.16
申请号
WO2007US15268
申请日期
2007.06.29
申请人
FSI INTERNATIONAL, INC.;BUTTERBAUGH, JEFFERY, W.;GAST, TRACY, A.
