发明名称 LIQUID JET HEAD AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a liquid jet head unerringly restraining a variation in the displacement of a piezoelectric element and having a stable ink discharge characteristic, and its manufacturing method. <P>SOLUTION: The liquid jet head has a channel forming substrate 10 having a pressure generation chamber 12 communicating with a nozzle opening 21 jetting a liquid, a lower electrode provided on one side of the channel forming substrate 10 and the piezoelectric element 300 made up of the piezoelectric material layer 70 and the upper electrode. The piezoelectric material layer 70 is made up of a lead-zirconate-titanate (100) and is a rhombohedral system structure or a monoclinic system structure preferredly orientated on the face, and saturation polarization Pm and residual polarization Pr satisfy 33%&le;2Pr/2Pm&le;46%. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008246797(A) 申请公布日期 2008.10.16
申请号 JP20070089867 申请日期 2007.03.29
申请人 SEIKO EPSON CORP 发明人 TAKABE HONKI;SUMI KOJI
分类号 B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/145;B41J2/16;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/23;H01L41/253 主分类号 B41J2/045
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