摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid jet head unerringly restraining a variation in the displacement of a piezoelectric element and having a stable ink discharge characteristic, and its manufacturing method. <P>SOLUTION: The liquid jet head has a channel forming substrate 10 having a pressure generation chamber 12 communicating with a nozzle opening 21 jetting a liquid, a lower electrode provided on one side of the channel forming substrate 10 and the piezoelectric element 300 made up of the piezoelectric material layer 70 and the upper electrode. The piezoelectric material layer 70 is made up of a lead-zirconate-titanate (100) and is a rhombohedral system structure or a monoclinic system structure preferredly orientated on the face, and saturation polarization Pm and residual polarization Pr satisfy 33%≤2Pr/2Pm≤46%. <P>COPYRIGHT: (C)2009,JPO&INPIT |