| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that the segmentation of a bonded workpiece with a laser beam requires a complicated step such as the first piece of scribing, an inversion, the first piece of cutting, the second piece of scribing, the inversion, and the first piece of cutting. <P>SOLUTION: In the bonded workpiece 1, the first step which radiates an energy for heating on a heating area 3 for first and second workpieces 1A, 1B, and scans along a processing scheduled line 2b, the second step which radiates an energy for cooling on a cooling area 4a positioned at the rear side of the heating area 3 and forms a scribing line, and the third step which radiates the energy for heating on a reheating area 5a positioned at the rear side of the cooling area 4a are sequentially applied. The depth of the scribing crack 5bA generated on the first workpiece 1A is shallower than the depth of the scribing crack 5bB generated on the second workpiece 1B, and the first and second workpieces 1A, 1B of the workpiece 1 are cut by applying a mechanical force from the second workpiece 1B side of an inverted workpece 1 to obtain a plurality of members. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
