EVALUATION SYSTEM OF GETTER, ITS EVALUATION METHOD, ITS EVALUATION METHOD AND ITS EVALUATION PROGRAM, AND DEVICE FOR EVALUATION OF GETTER

摘要

PROBLEM TO BE SOLVED: To provide a means by which capability of a getter arranged on a mounting device is evaluable.

SOLUTION: A device for evaluation of a getter is used which is equipped with one closed space, a getter arranged in that closed space, another closed space or a plurality of closed spaces that is coupled with that closed space via a flow passage equipped with a barrier rib, and vibration bodies formed in the respective closed spaces, and in which the gas is allowed to flow into the closed space where the getter is arranged by removing and penetrating at least a part of the barrier rib by using a laser.

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