| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a material feeding device which can raise the supply temperature of a material element and supply the material element stably. <P>SOLUTION: A vessel 10 of the material feeding device is constituted of a crucible 1 and an orifice 3. The crucible 1 has a cylindrical form, a prismatic form or the like and is configured to have a hollow shape. A heat source 2 such as a heater is arranged at the periphery of the crucible 1, and the orifice 3 having an opening part 3a is provided in the supply direction of the material element of the crucible 1. The orifice 3 has a tube part 3c extending toward the material element supply side, and the opening part 3a is formed at the tip end of the tube part 3c. Further, the tube part 3c is formed so that the opening area gradually becomes smaller toward the material element supply side, that is to say, the opening part 3a. <P>COPYRIGHT: (C)2009,JPO&INPIT |
