| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic inspection device that is reduced in size by using laser light, prevents degradation and deformation of an object to be inspected, and properly inspects in a wide range. SOLUTION: The ultrasonic inspection device 1 comprises a laser device 5 for emitting laser light and an ultrasonic transmission section 17 for volume inspection having a transmission diaphragm 39 for generating ultrasonic waves C, which performs volume inspection by applying the ultrasonic waves C generated by the transmission diaphragm 39 to the object to be inspected. In addition, the ultrasonic inspection device 1 additionally comprises an ultrasonic transmission section 19 for surface inspection, which performs hybrid inspection, such as volume and surface inspections that have different characteristics. COPYRIGHT: (C)2009,JPO&INPIT |
