| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic atomizer capable of freely controlling an atomizing area. SOLUTION: A nozzle holding plate 7 is positioned by a three dimensional controller 15. After that, the mixed solution of a raw material 50 with a solvent 51 to be deposited on a substrate 8 is atomized from a main nozzle 4. In such a case, the atomized liquid is diffused and atomized from the main nozzle 4 with the application of high voltage. On the other hand, a volatile solvent 53 containing no raw material 50 to be deposited is atomized from an auxiliary nozzle 5. Since high voltage is applied to the main nozzle 4 and the auxiliary nozzle 5 by a high voltage power source 10, both of the mist of the mixed solution of the raw material 50 with the solvent 51 and the mist of the solvent 53 are charged positively and act repulsively. Then the mist of the mixed solution of the raw material 50 with the solvent 52 has a spray area narrowed down from all sides and is concentrated on the center of the substrate 8. COPYRIGHT: (C)2009,JPO&INPIT |
