STAMP, METHOD, AND APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a stamp for use in a lithographic process such as patterning the surface layer. SOLUTION: The stamp (10) has a stamp body (1) with a first side face (11) and a second side face (12), wherein a printing face (2) is present on the first side face (11), and a stack of a carrier body (4) and a reservoir (3) for liquid on the second side face (12). The carrier body includes channels (5) in order that the liquid can be transported from the reservoir (3) to the stamp body (1) and further to the printing face (2). The stamp may be embodied as a cylinder and allows a continuous lithographic printing process. This process results in patterns on a micron order or less than micron order scale. The stamp (10) may further be included in a larger apparatus. COPYRIGHT: (C)2009,JPO&INPIT