| 摘要 |
PROBLEM TO BE SOLVED: To enable correction of a Y-axis drive system in consideration of the difference in thermal expansion between a spindle head and the drive shaft of the Y-axis drive system, and to keep the horizontal distance from the column side base end of the drive shaft of the Y-axis drive system to the shaft center of a spindle and that from the column side base end to a table reference position equal all the time. SOLUTION: Based on coefficients of linear expansionα,βand the temperature differenceΔT between a detected temperature T and a standard temperature TO, a Y-axis correction amountΔy is calculated by an arithmetic expressionΔy=[L×(α-β)×ΔT], and the Y-axis correction amountΔy is stored in RAM 27 (S3). However,ΔT=(T-TO). Next, a Y-axis motor 32 is driven by -Δy to make the calculated Y-axis correction amountΔy set to be 0 (S4). COPYRIGHT: (C)2009,JPO&INPIT
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