| 摘要 |
PROBLEM TO BE SOLVED: To improve the speed and the precision for calculating the discharge quantity of droplets to cope with expected demand hereafter in the application of a solution on a substrate. SOLUTION: In the method of applying the solution by which the solution is applied on the substrate 1, the discharge quantity of the droplet L is calculated on the basis of the calculated thickness of the droplet L by previously determining the relation thickness/absorbance between the thickness of droplet L applied on the substrate 1 and the absorbance in the absorption of light passing through the droplet L, measuring the absorbance of light with which the droplet L applied on the substrate 1 is irradiated and calculating the thickness of the droplet L corresponding to the measured absorbance based on the relation of the thickness/absorbance of the droplet L. COPYRIGHT: (C)2009,JPO&INPIT
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