| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing apparatus the operating time of which can be prolonged by shortening the time required when the vacuum processing apparatus is evacuated and to provide the maintenance method of the vacuum processing apparatus. SOLUTION: A heat generating body 14 is arranged detachably in a vacuum vessel 10. Then, the vacuum vessel 10 is evacuated. The inside of the vacuum vessel 10 is heated by the heating element 14 simultaneously with the evacuation work to evaporate a component (moisture or the like) adsorbed on substances which are stuck to the inside of the vacuum vessel and contain elements constituting a material gas. COPYRIGHT: (C)2009,JPO&INPIT
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