发明名称 Vertical system integration
摘要 The Vertical System Integration (VSI) invention herein is a method for integration of disparate electronic, optical and MEMS technologies into a single integrated circuit die or component and wherein the individual device layers used in the VSI fabrication processes are preferably previously fabricated components intended for generic multiple application use and not necessarily limited in its use to a specific application. The VSI method of integration lowers the cost difference between lower volume custom electronic products and high volume generic use electronic products by eliminating or reducing circuit design, layout, tooling and fabrication costs.
申请公布号 US2008254572(A1) 申请公布日期 2008.10.16
申请号 US20080143773 申请日期 2008.06.21
申请人 ELM TECHNOLOGY CORPORATION 发明人 LEEDY GLENN J.
分类号 H01L21/64;B81B7/00;B81B7/02;B81C3/00;G06F17/50;H01L21/8239;H01L21/8252;H01L21/84;H01L23/544;H01L25/065;H01L25/18;H01L27/06;H01L27/105;H01L27/118;H01L27/12;H01L27/146 主分类号 H01L21/64
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