INSPECTION APPARATUS OF A CIRCUIT SUBSTRATE

摘要

An inspection apparatus of a circuit board is provided to inspect a short-circuit of a fine pattern by applying AC power through a pin probe block at one side of the fine pattern and measuring an electrical variation through a capacitive non-contact sensor at the other side of the fine pattern. A capacitive non-contact sensor(50) measures voltage at one end of a pattern electrode(15) in a non-contact method. A plurality of pin probes(40) are in contact with the pattern electrode at the other end of the pattern electrode. A selector(30) selects the pin probes. A control unit(60) applies AC power to the pin probes selected by the selector and determines a short-circuit of the pattern electrode in contact with the selected pin probes based on output voltage of the capacitive non-contact sensor.