发明名称 |
Fast swap dual substrate transport for load lock |
摘要 |
A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber without the need for a central transport robot. The load lock transport is a dual element robot designed for minimum clearance and space and operates within a matching load lock chamber of minimum volume.
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申请公布号 |
US2008253868(A1) |
申请公布日期 |
2008.10.16 |
申请号 |
US20080148346 |
申请日期 |
2008.04.18 |
申请人 |
TALMER MARK A |
发明人 |
TALMER MARK A. |
分类号 |
B65G49/07;H01L21/67;H01L21/205;H01L21/3065;H01L21/677 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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