Measuring device, particularly for measuring shape and roughness of object surfaces, has movable supported base, and controlling device that is connected with interferometric space measuring device and driving device

摘要

The measuring device has a movable supported base, which stands in connection with a driving device (10). A controlling device is connected with an interferometric space measuring device (21) and the driving device. The driving device affects a measuring section (6) around its length. An independent claim is also included for a method for the execution of key section measurements with measuring device.