MANUFACTURABLE MICROPOSITIONING SYSTEM EMPLYOYING NON-LINEAR ACTUATOR

摘要

Embodiments of the present invention relate to systems and methods of position sensing that use a sensing target (290) with a pattern of features thereupon, and to positioning modules (1000) and systems that position functional elements using such position sensing systems (1030). A position sensing system (1030) includes an encoding module and a processing module. The encoding module has an active encoding region through which the sensing target (290) is configured to move. Further, the encoding module is configured to generate a signal based on a portion of the sensing target (3350) within the active encoding region. The active encoding region has a dimension greater than the average critical dimension of the pattern of features. The processing module is configured to convert the signal generated into a position data based on an input range condition and an initial position condition.