| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a long polishing pad having no joints and a method for productively manufacturing a polishing pad which can prevent slurry leakage from between a polishing region and a light transmission region. <P>SOLUTION: A cylindrical resin block 1 comprises cylindrical polishing regions 2, 4, and cylindrical light transmission regions 3, which are laminated. The manufacturing method comprises fabricating the cylindrical resin block obtained by laminating the cylindrical polishing regions and the cylindrical light transmission regions, and fabricating belt-like resin sheets 7 by rotating the resin block around the axis 5 thereof and slicing the surface portion of the resin block into a predetermined thickness. <P>COPYRIGHT: (C)2009,JPO&INPIT |
