TOOL FOR CARRYING SUBSTRATE, COMPONENT PACKAGING METHOD, AND COMPONENT PACKAGING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a tool for carrying a substrate that carries the substrate while preventing damage to the thinned substrate having a component packaging region at the edge, and to provide a component packaging method, and a component packaging apparatus.

SOLUTION: The tool for carrying a substrate comprises: a first plate member where the substrate is placed while a component packaging region arranged at the edge of the substrate is positioned outside the edge of the plate; a second plate member arranged so that the substrate is held between the second plate member itself and to the first plate member while the component packaging region is positioned outside the edge of the plate; and a fixing section for fixing the first and second plate members and holding the state where the substrate is sandwiched by respective plate members so that the state can be released. The tool for carrying a substrate holds the thinned substrate for conveyance.

COPYRIGHT: (C)2009,JPO&INPIT