| 摘要 |
PROBLEM TO BE SOLVED: To provide a carbon nanotube which can produce a high-density carbon nano tube, and to provide its production process. SOLUTION: A plurality of Co particles 13 corresponding to almost one layer are dispersed on a TiN film 12 to form a Co film covering the Co particles 13 on the TiN film 12. A bundle of fibrous carbon nanotubes 17 is then formed by thermal CVD. The Co film 14 aggregates without maintaining its form and new Co particles 15 are formed. As a result, a clearance appears between a shade portion 16 and the Co particle 13. A material is supplied to the clearance between the shade portion 16 and the Co particle 13, a bundle of fibrous carbon nanotubes 17 grows in root growth pattern starting from the Co particle 13, and a bundle of fibrous carbon nanotubes 17 grows in tip growth pattern starting from the Co particle 15. In other words, a carbon nano tube 17 extends from the Co particle 13, and a carbon nanotube 17 also extends from the Co particle 15. COPYRIGHT: (C)2009,JPO&INPIT |
