| 摘要 |
PROBLEM TO BE SOLVED: To provide a functional liquid supply device in which the stoppage of drawing processing by a functional liquid droplet discharge head in the exchange of a main tank is not required. SOLUTION: The functional supply device is provided with a plurality of subtanks 121 for supplying the functional liquid respectively to functional liquid droplet discharge head 17, a main tank 181 for replenishing the functional liquid respectively to the a plurality of the subtanks 121, an upstream side function liquid flow passage 126 connected to the tank unit 122 on the upstream side and connected to each subtank on the lower stream side, a buffer tank 123 interposed in the upstream side functional liquid flow passage 126, gaseous nitrogen supply equipment 85 capable of pressuring an supplying the functional liquid in the buffer tank 123 to each subtank 121 in the exchange of the main tanks 181 and a plurality of fourth on-off valves 139 interposed in the upstream side functional liquid flow passage 126 and for replenishing the functional liquid to each subtank 121 by the on-off operation. COPYRIGHT: (C)2009,JPO&INPIT
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