FILM FORMING METHOD AND PRODUCTION PROCESS OF LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a film capable of assuring the uniformity of alignment without increasing a vapor deposition distance even when a substrate of a large area is used. SOLUTION: The method of forming the film on the substrate includes: a step of holding deposited substrate so that the direction where a material vaporized from an evaporation source runs to the film formation surface of the substrate is inclined to a normal line direction of the deposited substrate; a step of providing an energy which changes with position within a surface to the film forming surface of the deposited substrate; and a step of forming the film which deposits the material vaporized from an evaporation source to the substrate. COPYRIGHT: (C)2009,JPO&INPIT