| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a group III nitride crystal, by avoiding the disassembly of an inner container and the like, while preventing parts in an outer container from exposing to the atmosphere. SOLUTION: An apparatus for manufacturing a crystal comprises: a crucible 10 holding a melt mixture including an alkali metal and a group III nitride; a reaction vessel 20 housing the crucible 10 therein; heating devices 50, 60 heating the crucible 10 through the reaction vessel 20; a holding container 300 having a main part 301 capable of opening and closing in which the reaction vessel 20 and the heating devices 50, 60 are housed; and a sealed container 400 housing the holding container 300 therein, and having an operating means for opening and closing the main part 301 of the holding container as closed state, and charging a raw material into the crucible 10 and taking out the manufactured group III nitride crystal, in which an atmosphere is inert gas or nitrogen gas. COPYRIGHT: (C)2009,JPO&INPIT
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