发明名称 METHOD FOR ASSEMBLING AT LEAST TWO PLATES AND USE OF SAID METHOD FOR MAKING AN IONIC SPUTTERING ASSEMBLY
摘要 The invention relates to a method that comprises: depositing, on one of the plates (2), studs (3) of an adhesive material spaced from each other; applying on the plate (2) with the studs (3) a grid (5) having a predetermined thickness lower than that of the studs (3); applying a uniform and perpendicular pressure on at least one of the plates so that the studs (3) can spread and contact the opposite faces of two plates (1) and (2); wherein the space (4) between the studs is determined so that, after the spreading under the applied pressure, no air is trapped between said studs.
申请公布号 WO2008122738(A2) 申请公布日期 2008.10.16
申请号 WO2008FR50358 申请日期 2008.03.03
申请人 H.E.F.;MARTIN, MICHEL;MAURIN-PERRIER, PHILIPPE;HEAU, CHRISTOPHE;BLANDENET, OLIVIER 发明人 MARTIN, MICHEL;MAURIN-PERRIER, PHILIPPE;HEAU, CHRISTOPHE;BLANDENET, OLIVIER
分类号 C23C14/00 主分类号 C23C14/00
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