METHOD FOR ASSEMBLING AT LEAST TWO PLATES AND USE OF SAID METHOD FOR MAKING AN IONIC SPUTTERING ASSEMBLY
摘要
The invention relates to a method that comprises: depositing, on one of the plates (2), studs (3) of an adhesive material spaced from each other; applying on the plate (2) with the studs (3) a grid (5) having a predetermined thickness lower than that of the studs (3); applying a uniform and perpendicular pressure on at least one of the plates so that the studs (3) can spread and contact the opposite faces of two plates (1) and (2); wherein the space (4) between the studs is determined so that, after the spreading under the applied pressure, no air is trapped between said studs.