VISION INSPECTION SYSTEM AND METHOD FOR INSPECTING WORKPIECE USING THE SAME

摘要

A vision inspection system and a method for inspecting a workpiece thereby are provided to easily carry out positioning and alignment of line-scan cameras and to accurately inspect defects of a workpiece. A vision inspection system includes a workpiece stage, line-scan cameras(40-1~40-n), and a computer. The workpiece stage transfers a table to a first position for loading a workpiece on the table and to a second position for scanning the workpiece. The table includes marks having mark stage coordinates in the alignment direction of the line-scan cameras. The line-scan cameras scan the workpiece to obtain image of the workpiece. The computer is connected to the workpiece stage and the line-scan cameras.