| 发明名称 |
Integration of automated cryopump safety purge |
| 摘要 |
<p>A method of controlling a cryopump, the method comprising: responding to a potentially unsafe condition in the cryopump by: retaining a normally open purge valve closed for a period of time; and after the period of time elapses, allowing the purge valve to open to emit a purse gas into the cryopump.</p> |
| 申请公布号 |
EP1980748(A1) |
申请公布日期 |
2008.10.15 |
| 申请号 |
EP20080075586 |
申请日期 |
2004.06.09 |
| 申请人 |
HELIX TECHNOLOGY CORPORATION |
发明人 |
AMUNDSEN, PAUL E;BUONPANE, MAUREEN;ANDREWS, DOUG;JACOBS, JORDAN |
| 分类号 |
F04B37/08;F04B49/06 |
主分类号 |
F04B37/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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