发明名称 |
ANGULAR RATE SENSOR HAVING A SENSE ELEMENT CONSTRAINED TO MOTION ABOUT A SINGLE AXIS AND FLEXIBLY ATTACHED TO A ROTARY DRIVE MASS |
摘要 |
<p>Disclosed is a micro-gyro and method of driving a micro-gyro. The method and structure are embodied in a micro-gyro of the type where first flexures extend from an anchor connect to a sense plate, where second flexures extend from the sense plate connect to a drive ring, where the drive ring is driven to oscillate about a drive axis, and where the first flexures constrain the sense plate from moving about the drive axis but permit the sense plate and the attached drive ring to rock about a sense axis. The sense plate, drive ring and flexures form a plate-ring-flexure system that is tuned such that the system rocks about the sense axis in a first or fundamental mode where the plate and ring move substantially in phase at the lowest resonant frequency.</p> |
申请公布号 |
EP1440321(B1) |
申请公布日期 |
2008.10.15 |
申请号 |
EP20020744347 |
申请日期 |
2002.06.14 |
申请人 |
MICROSENSORS INC. |
发明人 |
REEDS, JOHN, W.;HSU, YING, W. |
分类号 |
G01C19/5712 |
主分类号 |
G01C19/5712 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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