METHOD FOR REGULATING CAPACITANCE VALUE OF BUILT-IN CAPACITOR IN MULTILAYERED CERAMIC SUBSTRATE, AND MULTILAYERED CERAMIC SUBSTRATE AND PROCESS FOR PRODUCING THE SAME

摘要

In a multilayer ceramic substrate, without significantly changing the insulation resistance between capacitor electrodes and the Q value of a capacitor, there is provided a method for performing laser trimming to obtain a precise capacitance value of a built-in capacitor. In a multilayer ceramic substrate (1) having a built-in capacitor (2) formed in a ceramic laminate (6) composed of a plurality of ceramic layers (3 to 5) laminated to each other, the built-in capacitor (2) being formed of a first capacitor electrode (7), a second capacitor electrode (8), and the dielectric glass ceramic layer (4), the capacitance value of the built-in capacitor (2) is regulated by performing laser trimming of the first capacitor electrode (7). In this case, the dielectric glass ceramic layer (4) is formed of a TiO 2 -based dielectric glass ceramic layer in which the content of dielectric grains including TiO 2 is 10 to 35 percent by volume.