| 摘要 |
PROBLEM TO BE SOLVED: To perform the pressure feedback control of a pneumatic spring. SOLUTION: In a vibration removing device having a displacement compensator 9 which compensates a difference signal between an output signal of a displacement target generator 7 which outputs a target value for the displacement of a vibration removing base 1 and a pneumatic spring 5 and an output signal of a displacement sensor 2 and controls the displacement of the vibration removing base and the pneumatic spring, an acceleration compensator 10 which compensates an output signal of an acceleration sensor 6 to perform negative-feedback of acceleration of the vibration damping table to an input side of the displacement compensator, a pressure command generator 11 which outputs a command for a pressure of the pneumatic spring, and a power amplifier 13 driving an air valve in accordance with an output signal of a pressure compensator 12 which compensates a synthetic signal of output signals of the displacement compensator and the pressure command generator 11 and an output signal of a pressure sensor and controls a pressure of the pneumatic spring, a rigidity compensator 8 which has a low cut filter and a proportional gain element, compensates an output signal of the displacement sensor, to perform negative-feedback to an input side of the pressure compensator 12 is provided to control the rigidity of the pneumatic spring. |
