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发明名称
CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING APPARATUS
摘要
申请公布号
EP1568074(B1)
申请公布日期
2008.10.15
申请号
EP20020788980
申请日期
2002.11.21
申请人
DOOSAN MECATEC CO., LTD.
发明人
JUNG, TAEK-SOO
分类号
H01L21/302;H01L21/304;B24B1/00;B24B37/04;B24B41/06
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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