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摘要
申请公布号
JP4167388(B2)
申请公布日期
2008.10.15
申请号
JP20000295237
申请日期
2000.09.27
申请人
发明人
分类号
H01L21/31;H01L21/768;H01L21/3105;H01L21/312;H01L21/316;H01L21/3205;H01L23/522
主分类号
H01L21/31
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