VORRICHTUNG UND VERFAHREN ZUR WÄRMEBEHANDLUNG,申请号AT20040726945T-传众专利搜索

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发明名称	VORRICHTUNG UND VERFAHREN ZUR WÄRMEBEHANDLUNG
摘要
申请公布号	AT408893(T)	申请公布日期	2008.10.15
申请号	AT20040726945T	申请日期	2004.04.13
申请人	SINGULUS TECHNOLOGIES AG	发明人	EISENHAMMER, THOMAS;MATT, THOMAS;STRITTMATTER, GEBHARD;ZAPF, KLAUS
分类号	H01L21/00;A21B1/00;A21B1/22;F26B15/04;F27D11/00;G11B7/26;H01L21/687;H05B3/06	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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