| 摘要 |
<p>There is provided is an optical member-holding apparatus which can hold a plurality of optical members of two different optical systems, even when the optical members exist in a common barrel in a mixed manner, such that the relative positions between the optical members can be easily adjusted; and which holds a mirror (M4) in a projection optical system and a mirror (M) in an illumination optical system and includes a barrel unit (12C), an inner ring (21) holding the mirror (M4), a holding member (32) holding the mirror (M), a support plate (25C, 31) attached to the barrel unit (12C), and a holding-supporting mechanism (13D, 13M) attached to the support plate (25C, 31) and adjusting the relative position of the mirror (M4) to the mirror (M).</p> |
