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发明名称
SCHICHTEN IN SUBSTRATSCHEIBEN
摘要
申请公布号
AT410786(T)
申请公布日期
2008.10.15
申请号
AT20010985370T
申请日期
2001.12.06
申请人
IHP GMBH-INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/INSTITUT FUER INNOVATIVE MIKROELEKTRONIK
发明人
HEINEMANN, BERND;EHWALD, KARL-ERNST;KNOLL, DIETER;TILLAK, BERND;WOLANSKY, DIRK;SCHLEY, PETER
分类号
H01L21/8238;H01L21/265;H01L21/74;H01L21/8249;H01L27/06;H01L27/092;H01L29/10;H01L29/78
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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