| 摘要 |
An arm apparatus is provided to prevent separation of a belt from a belt pulley by adjusting a width of a belt pulley guard. A deck unit(100) includes a pincette for picking up a wafer and mounting the wafer into a process device and a transfer device. A shaft unit(200) fixes and supports rotatably the deck unit. The shaft unit includes a shaft frame(202), a motor(203) fixed to the shaft frame, a power transmission shaft fixed rotatably to the shaft frame to transmit the totatory power of the motor to the deck unit by using a belt, and three fixing shafts installed radially on the shaft frame to surround the power transmission shaft.
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