| 摘要 |
A set of anti-adhesion tooth regions formed as a portion of an microelectromechanical device, with the set of anti-adhesion comprising a plurality of tooth regions formed and extending from first portion of a microelectromechanical device, with the tooth regions shaped such that when the first portion of the microelectromechanical device is urged into contact with another portion of a microelectromechanical device, the tooth regions provide for reduced adhesion, thereby preventing adhesion of the first portion of the microelectromechanical device with the other portion of a microelectromechanical device. |
