TESTING METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT AND IC TESTER THEREOF

摘要

A method of testing a semiconductor integrated circuit and an IC tester are provided to detect a short circuit between pins by determining the short circuit according to a waveform of a pin of the semiconductor IC. A DUT(Device Under Test)(10) is an LCD(Liquid Crystal Display) driver. A semiconductor IC is mounted on a TAB(Tape Automated Bonding) tape. The semiconductor IC is connected to the DUT through plural pins. A testing unit(40) is installed in an IC tester and electrically connected to the pins of the DUT. The testing unit generates pulses on the predetermined pin of the DUT and detects an inter-pin short circuit by using waveforms from adjacent pins. A pulse generator(41), a determining unit(42), and a controller(43) are installed in the testing unit. The pulse generator is an active load circuit and generates pulses on the pin. The controller controls the pulse generator and the determining unit and detects the inter-pin short circuit according to the measured result of the determining unit. An inter-pin capacitance represents a capacity component between pins of the DUT.