| 摘要 |
A probe card includes a flexible membrane, a plurality of probes attached to the flexible membrane, and a layer of foam connected to the flexible membrane so that when the probes are moved into the flexible membrane, the layer of foam is also deflected to produce a counteracting force at the probes. A plurality of push rods are used to transfer the force at the contacts to the foam layer. The foam layer is attached to a rigid plate or push plate. A guide plate includes openings through which the push rods pass. The guide plate supports the push rods along their length and reduces the spacing between the push rods at the flexible member when compared to the spacing of the push rods at the foam layer.
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