发明名称 |
Ion source |
摘要 |
An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used with a hot filament arc chamber housing that either directly or indirectly heats a cathode to sufficient temperature to cause electrons to stream through the ionization region of the arc chamber. A temperature sensor monitors temperatures within the arc chamber and provides a signal related to sensed temperature. A controller monitors sensed temperature as measured by the sensor and adjusts the temperature to maintain the sensed temperature within a range.
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申请公布号 |
US7435971(B2) |
申请公布日期 |
2008.10.14 |
申请号 |
US20060437547 |
申请日期 |
2006.05.19 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
VANDERBERG BO H.;BENEVISTE VICTOR M.;FALLON JOHN F.;POKIDOV ILYA |
分类号 |
H01J37/08;H01J7/24;H01J27/20 |
主分类号 |
H01J37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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