发明名称 Wafer-level bonding for mechanically reinforced ultra-thin die
摘要 An embodiment of the present invention is a technique to fabricate a package. A metal sheet having trenches is formed. A thinned wafer supported by a wafer support substrate (WSS) is formed. The metal sheet is bonded to the WSS-supported thinned wafer to form a metal bonded thinned wafer. The thinned wafer is diced to the trenches into die assemblies.
申请公布号 US7435664(B2) 申请公布日期 2008.10.14
申请号 US20060479835 申请日期 2006.06.30
申请人 INTEL CORPORATION 发明人 LU DAOQIANG;TANG JOHN
分类号 H01L21/00 主分类号 H01L21/00
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