发明名称 |
Optical device and method for manufacturing the same |
摘要 |
A method for manufacturing an optical device is provided. The device includes an optical waveguide path having a Bragg grating and a movable portion disposed near the Bragg grating. A displacement of the movable portion provides a change of spacing of the Bragg grating so that a light passing through the optical waveguide path is changed. The optical device detects the physical quantity based on a change of the light. The method includes steps of: forming the optical waveguide path with the Bragg grating on a first part of a silicon substrate; and forming the movable portion on a second part of the silicon substrate.
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申请公布号 |
US7437036(B2) |
申请公布日期 |
2008.10.14 |
申请号 |
US20060513072 |
申请日期 |
2006.08.31 |
申请人 |
DENSO CORPORATION |
发明人 |
OOHARA JUNJI;TAKEUCHI YUKIHIRO |
分类号 |
G02B6/00;G02B5/18;G02B6/34 |
主分类号 |
G02B6/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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